Olthoff, J.
, Van Brunt, R.
, Radovanov, S.
, Rees, J.
and Surowiec, R.
(1994),
Kinetic-Energy Distributions of Ions Sampled from Argon Plasmas in a Parallel-Plate Radio Frequency Reference Cell, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=27094
(Accessed July 18, 2024)
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Kinetic-Energy Distributions of Ions Sampled from Argon Plasmas in a Parallel-Plate Radio Frequency Reference Cell
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Author(s)
, , S. B. Radovanov, J. A. Rees, R. Surowiec
Citation
Journal of Applied Physics
Volume
75
Pub Type
Journals
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Created December 31, 1993, Updated October 12, 2021