Seiler, D.
and Suehle, J.
(2006),
Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry, Semiconductor International
(Accessed March 11, 2025)
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Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry
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Abstract
This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.Citation
Semiconductor International
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Created November 1, 2006, Updated January 27, 2020