Modeling and Disturbance Rejection Control of a Nanopositioner with Application to Beam Steering

Published

November 1, 2003

Author(s)

Jason J. Gorman, Nicholas Dagalakis

Abstract

This paper discusses the modeling and control of a nanopositioning flexure hinge mechanism with a piezoelectric actuator. A complete dynamic model for the mechanism is presented along with experimentally determined system parameters. The control design concentrates on the problem of controlling the nanopositioner when base excitations are injected into the system. The effects of the base excitation are overcome using two approaches. A robust tracking controller is developed which cancels the excitation effect on the tracking error. An inertial compensator is used to update the desired trajectory based on the base motion so that the nanopositioner performs the desired trajectory in an inertial frame. This approach is demonstrated through simulation results. These principals are being developed for use in beam steering applications which require nanoradian resolution and very low beam jitter.

Proceedings Title

Dynamic Systems and Control Division | | 2003 Proceedings of the ASME Dynamic Systems and Control Division, Volume 2 | ASME

Volume

72

Issue

no. 2

Conference Dates

November 15-21, 2003

Conference Location

Undefined

Conference Title

American Society of Mechanical Engineers

Pub Type

Conferences

Download Paper

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Keywords

base excitation, beam jitter, beam steering, disturbance rejection, nanopositioning

Citation

Gorman, J. and Dagalakis, N. (2003), Modeling and Disturbance Rejection Control of a Nanopositioner with Application to Beam Steering, Dynamic Systems and Control Division | | 2003 Proceedings of the ASME Dynamic Systems and Control Division, Volume 2 | ASME, Undefined, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823470 (Accessed October 21, 2025)