Microstructural Properties of (Ba,Sr)Ti03 Films Fabricated from BaF2/SrF2/Ti02 Amorphouse Multilayers Using the Combinatorial Precursor Method

Published

September 1, 2001

Author(s)

Ichiro Takeuchi, K S. Chang, R P. Sharma, Leonid A. Bendersky, H C. Chang, X D. Xiang, E A. Stach, C Y. Song

Abstract

We have investigated the microstructure of (Ba,Sr)Ti0₃ films fabricated from BaF₂/SrF₂/Ti0₂ amorphouse multilayers. Rutherford backscattering spectroscopy and x-ray diffraction studies show that a controlled thermal treatment can interdiffuse the multilayers so as to create predominantly single-phase epitaxial (Ba,Sr)Ti0₃ films. High resolution cross-sectional transmission electron microscopy investigation of the processed films shows that they consist of large epitaxial grains of (Ba,Sr)Ti0₃ with atomically sharp interfaces with the LaAl0₃ substrates. In addition, we have identified regions where polycrystalline and amorphous phases exist in small pockets in the film matrix. The results here indicate that the combinatorial thin-film synthesis using precursors can produce (Ba,Sr)Ti0₃ films in combinatorial libraries which exhibit properties similar to those films made by conventional techniques.

Citation

Journal of Applied Physics

Volume

90

Issue

No. 5

Pub Type

Journals

Keywords

(Ba, Sr)Ti0₃, combinatorial, PLD, TEM, thin films

Citation

Takeuchi, I. , Chang, K. , Sharma, R. , Bendersky, L. , Chang, H. , Xiang, X. , Stach, E. and Song, C. (2001), Microstructural Properties of (Ba,Sr)Ti0₃ Films Fabricated from BaF₂/SrF₂/Ti0₂ Amorphouse Multilayers Using the Combinatorial Precursor Method, Journal of Applied Physics (Accessed November 9, 2024)