Relationship Between Thermocouple and Radiation Thermometer Measurements

Published

September 1, 2000

Author(s)

D P. DeWitt

Abstract

The purpose of this vuegraph presentation is to describe the relationship between temperatures measured by thermocouples (contact) and radiation thermometers (RTs). The procedures are discussed for calibration of light-pipe RTs (LPRTs) using blackbodies and instrumented wafers. Using three idealized reactor designs, thermal models are developed for relating LPRT spectral radiance and target temperatures. Recommendations are offered for good practice in making reliable measurements.Publication of the Workshop vuegraphs - (1) attendees of the Workshop will be provided with a spiral-bound booklet of the vuegraphs prepared by the 9 presenters and (2) the same collection will be included as an appendix to the Proceedings of the 8th International Conference on Advanced Thermal Processing of Semiconductors, RTP'2000 held in Gaithersburg, MD Sept 20-22, 2000.

Proceedings Title

A Satellite Workshop held at NIST Conducted in Collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP'2000

Conference Dates

September 19-20, 2000

Conference Title

Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples

Pub Type

Conferences

Keywords

blackbody, lisht-pipe radiometers, radiation thermometry, rapid-thermal processing, thermal modeling

Citation

DeWitt, D. (2000), Relationship Between Thermocouple and Radiation Thermometer Measurements, A Satellite Workshop held at NIST Conducted in Collaboration with the 8th International Conference on Advanced Thermal Processing of Semiconductors - RTP'2000 (Accessed July 27, 2024)