Development of a Spectral Database for Testing Quantitataive Electron Probe Microanalysis of Rough, Bulk Samples

Published

January 1, 2000

Author(s)

Dale E. Newbury

Abstract

Surface roughness can substantially modify the generation and escape of x-rays from a target under electron bombardment. The ideal specimen for electron probe x-ray microanalysis is carefully prepared to eliminate surface roughness, but many practical applications require that surfaces be analyzed in the as-received condition, including possible artifacts from roughness. A database is being developed of energy dispersive x-ray spectra from microhomogeneous standards with controlled roughness to address the problem of testing various correction procedures, such as the peak-to-background method. Examples of the standards and surface treatments will be described, as well as a preliminary examination of the intensity data to assess the severity of roughness effects.

Citation

Microscopy and Microanalysis

Pub Type

Journals

Keywords

electron probe x-ray microanalysis, energy dispersive x-ray spectrometry, microanalysis, quantitative x-ray analysis

Citation

Newbury, D. (2000), Development of a Spectral Database for Testing Quantitataive Electron Probe Microanalysis of Rough, Bulk Samples, Microscopy and Microanalysis (Accessed July 27, 2024)