Newbury, D.
(2000),
Quantitative Electron Probe Microanalysis of Rough, Bulk Samples, Microbeam Analysis
(Accessed March 13, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Quantitative Electron Probe Microanalysis of Rough, Bulk Samples
Published
Author(s)
Abstract
Surface roughness degrades the accuracy of quantitative electron probe x-ray microanalysis through the action of geometric effects on x-ray production and absorption. Measurements of rough surfaces produced on NIST microhomogeneous SRMs will be used to address key questions on the phenomenon: (1) What is the magnitude of the roughness (geometrical) effect? (2) What is its dependence on photon energy? (3) Can overscanning a rough area, assuming it is locally homogeneous in composition, compensate for roughness? (4) Can the peak-to-local-background ratio be used to compensate for roughness effects in point analyses?Citation
Microbeam Analysis
Pub Type
Journals
Keywords
electron probe x-ray microanalysis, energy dispersive x-ray spectrometry, microanalysis, quantitative x-ray analysis
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2000, Updated February 17, 2017