Penzes, W.
, Allen, R.
, Cresswell, M.
, Linholm, L.
and Teague, E.
(1999),
A New Method to Measure the Distance Between Graduation Lines on Graduated Scales, IEEE Transactions on Instrumentation and Measurement
(Accessed December 22, 2024)
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A New Method to Measure the Distance Between Graduation Lines on Graduated Scales
Published
Author(s)
, , , L Linholm,
Abstract
Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from the technique are presented.Citation
IEEE Transactions on Instrumentation and Measurement
Volume
48(6)
Pub Type
Journals
Keywords
electrical calibration, electrical test structure, laser interferometry, length, line scale, measurement uncertainty, optical calibration, potentiometer, scale graduations, stage micrometer, voltage-dividing
Citation
Issues
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Created November 30, 1999, Updated October 12, 2021