Howard, L.
and Fu, J.
(1997),
Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress, Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX, USA
(Accessed October 13, 2025)
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Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress
Published
Author(s)
,
Abstract
A survey of nanonewton force calibration techniques suitable for micro-electromechanical systems (MEMS) is presented. The reviewed techniques include: mass-derived force, pendulums, calibrated master spings, resonance and electromagnetic techniques. Considerable background material is provided to support the hypothesis that virtual power methods, such as those employed on the NIST watt balance, are applicable to the MEMS force calibration problem. A review of progress at NIST on two prototype nanowatt balances designed for MEMS calibration is given.Proceedings Title
Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors
Volume
3225
Conference Dates
September 29, 1997
Conference Location
Austin, TX, USA
Conference Title
Micrometrology Techniques
Pub Type
Conferences
Keywords
AFM, force measurement, MEMS, nanonewton
Citation
Issues
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Created August 31, 1997, Updated October 12, 2021