Kopanski, J.
, Marchiando, J.
and Rennex, B.
(1999),
Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
(Accessed August 31, 2024)