Dagata, J.
, Tseng, W.
, Bennett, J.
, Dobisz, E.
, Schneir, J.
and Harary, H.
(1992),
Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing, Journal of Vacuum Science and Technology
(Accessed January 2, 2025)
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Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing
Published
Author(s)
, W. F. Tseng, J. Bennett, E. A. Dobisz, J. Schneir,
Citation
Journal of Vacuum Science and Technology
Volume
A 10
Issue
4
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created July 31, 1992, Updated October 12, 2021