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Tuning of Tungsten Thin Film Superconducting Transition Temperature for Fabrication of Photon Number Resolving Detectors
Published
Author(s)
Adriana Lita, Danna Rosenberg, Sae Woo Nam, Aaron J. Miller, Davor Balzar, L. M. Kaatz, R. E. Schwall
Abstract
Tungsten thin films can form in one of two crystal structures: alpha (bcc), with a superconducting transition temperature (Tc) of 15 mK, and beta (A15), with a Tc between 1 and 4 K. Films with intermediate Tcs are composed of both alpha and beta phases. We have investigated how to tune the film Tc in order to obtain certain values (Tc100mK) suitable for fabrication of photon number resolving transition-edge sensor (TES) and arrays of TES detectors for astronomical and quantum information applications. Variation of deposition conditions, and also the choice of the underlayer/coating for equal deposition conditions, affect the Tcs of the tungsten films. We have used x-ray diffraction to determine the structure of tungsten thin films and film stress. The results indicates the the film stress state depends on the underlying substrate and coating. To understand the variation of Tc values and to allow precise tuning of these values, we have investigated substrates and coatings for tungsten film multilayer stacks and determined tungsten film stress by X-ray diffraction at both room temperature and 8 K.
Lita, A.
, Rosenberg, D.
, Nam, S.
, Miller, A.
, Balzar, D.
, Kaatz, L.
and Schwall, R.
(2005),
Tuning of Tungsten Thin Film Superconducting Transition Temperature for Fabrication of Photon Number Resolving Detectors, IEEE Transactions on Applied Superconductivity, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31827
(Accessed October 11, 2025)