Consistency of Calculated and Measured Electron Inelastic Mean Free Paths

Published

December 1, 1998

Author(s)

Cedric J. Powell, Aleksander Jablonski

Abstract

We present an evaluation of the consistency of calculated and measured electron inelastic mean free paths (IMFPs) for seven elemental solids (Al, Si, Ni, Cu, Ge, Ag, and Au). These solids were selected because, for each, there were two or more independent IMFP calculations and two or more IMFP measurements by elastic-peak electron spectroscopy. We found that the calculated IMFPs for each element showed a high degree of consistency and that there was greater scatter among the measured IMFPs. Comparison of the measured IMFPs with the calculated IMFPs showed generally good agreement. The greatest consistency in the comparisons was found for Ni, Cu, Ag, and Au. Recommended values of the IMFPs for these four elements can be obtained from a simple formula (used to fit the calculated IMFP's for each element) for electron energies between 50 and 10⁴ eV.

Citation

Journal of Vacuum Science and Technology A

Volume

17

Pub Type

Journals

Keywords

Auger-electron spectroscopy, electron inelastic mean free path, surface analysis, XPS

Citation

Powell, C. and Jablonski, A. (1998), Consistency of Calculated and Measured Electron Inelastic Mean Free Paths, Journal of Vacuum Science and Technology A (Accessed November 8, 2024)