Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Superconducting Multi-layer Transition-edge Sensor And Hybrid Subtractive-additive Production Of A Superconducting Multi-layer Transition-edge Sensor
Patent Number: 11,933,922
Abstract
Hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor includes: forming a superconductor layer; forming a patterning photoresist on the superconductor layer; forming a sensor pattern in the patterning photoresist; subtractively forming, from the superconductor layer, the superconductor sensor layer; removing the patterning photoresist from the superconductor sensor layer; forming a template photoresist on the superconductor sensor layer; forming an inverse normal metal layer pattern in the template photoresist and exposing a bilayer portion of the superconductor sensor layer for addition of a normal metal layer; and additively forming the normal metal layer on the superconductor sensor layer such that the sensor pattern is interposed between the normal metal layer and the substrate.