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Solomon I. Woods, Jorge Neira, James E. Proctor, Joseph P. Rice, Nathan Tomlin, Malcolm White, Michelle Stephens, John H. Lehman
We have developed generalized methods for electrical substitution optical measurements, as well as cryogenic detectors which can be used to implement them. The
Jorge Neira, Solomon I. Woods, James E. Proctor, Joseph P. Rice
We have demonstrated the first continuous-scan Electrical Substitution Fourier Transform Spectrometer (ES-FTS), which serves initially as an apparatus for
Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai
Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of
The Facility for Automated Spectroradiometric Calibrations (FASCAL) is the primary facility for spectral irradiance and spectral radiance calibrations at NIST