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M Alkan Donmez (Fed)

Publications

Integrated metrology for advanced manufacturing

Author(s)
andreas archenti, Wei Gao, Alkan Donmez, Enrico Savio, Naruhiro Irino
The transition from conventional standalone metrology to integrated metrology has been accelerating in advanced manufacturing over the past decade. This keynote
Created October 9, 2019, Updated December 8, 2022