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Mark McLean (Fed)

Materials Research Engineer

Research Interests

  • In-situ micro/nano-mechanical test techniques
  • Fabrication of micro/nano-scale devices
  • Atom probe tomography

Publications

Nanocalorimetry for plasma metrology relevant to semiconductor fabrication

Author(s)
John Diulus, Carles Corbella Roca, Feng Yi, David LaVan, Berc Kalanyan, Mark McLean, Lakshmi Ravi Narayan, William Osborn, James Maslar, Andrei Kolmakov
This letter reports on pilot tests of microfabricated nanocalorimeters as a metrology platform for the rapid (sub-100 ms response time) and sensitive detection

Ranging Atom Probe Spectra to Reduce Measurement Bias

Author(s)
Frederick Meisenkothen, David Newton, Karen DeRocher, Mark McLean
Atom probe tomography (APT) is emerging as an essential characterization tool in a wide variety of science and engineering fields. For example, APT is helping
View more Publications
Created October 9, 2019, Updated December 8, 2022