Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Al, B, and Ga Ion-Implantation Doping of SiC

Published

Author(s)

E Handy, M V. Rao, O W. Holland, P Chi, K A. Jones, M A. Derenge, R D. Vispute, T Venkatesan

Abstract

A Series of single energy Al, B, and Ga ion implants were performed in the energy range 50 keV - 4 MeV into 6H-SiC to characterize the implant depth profiles using secondary ion mass spectrometry (SIMS). From the implant depth profiles empirical formulae were developed to model the range statistics as functions of energy. Multiple energy implants were performed into 6H- and 4H-SiC and annealed with both AlN and graphite encapsulants to determine the ability of the encapsulants to protect the implants from out-diffusion and redistribution. Al and Ga were thermally stable, but B out-diffused even with A1N or graphite encapsulation. Electrical activation was determined by Hall and capacitance-voltage measurements. An acceptor substitutional concentration of 7 x 1016cm-3 was achieved for 1 x 1017 cm-3 Al implantation.
Citation
Journal of Electronic Materials
Volume
29
Issue
No. 11

Keywords

A1N, diffusion, Ion Implantation, SiC, SIMS

Citation

Handy, E. , Rao, M. , Holland, O. , Chi, P. , Jones, K. , Derenge, M. , Vispute, R. and Venkatesan, T. (2000), Al, B, and Ga Ion-Implantation Doping of SiC, Journal of Electronic Materials (Accessed October 10, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 31, 2000, Updated October 12, 2021
Was this page helpful?