Abbott, P.
(2006),
The Calibration of Vacuum Gauges, Vacuum Technology and Coating Magazine
(Accessed March 13, 2025)
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The Calibration of Vacuum Gauges
Published
Author(s)
Abstract
Vacuum gauges are used to measure pressures below the local atmospheric pressure. The success of many processes relies on an accurate vacuum pressure measurement, making calibration of vacuum gauges essential. This paper discusses the issues related to vacuum gauge calibration, including what to expect from a calibration, calibration uncertainty, and traceability to calibration standards.Citation
Vacuum Technology and Coating Magazine
Pub Type
Others
Keywords
calibration, gauges, pressure, uncertainty, vacuum
Citation
Issues
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Created March 1, 2006, Updated February 19, 2017