Dimensional Metrology of Lab on a Chip Internal Structures: a Comparison of Optical Coherence Tomography with Coherence Fluorescence Microscopy

Published

April 8, 2015

Author(s)

Darwin R. Reyes-Hernandez, Michael W. Halter, Jeeseong Hwang

Abstract

The characterization of internal structures in a polymeric device, specifically of a final product, will require a different set of metrology techniques than those traditionally use in the characterization of microelectronic devices. OCT is relatively new, promising technology based on optical interferometry principles that detect reflected (or backscattered) light from each optical interface, in a sample, in a time-delay manner. Here, we combined the use of OCT with an in-house written Image J Macro to analyse the A-scans collected from PMMA lab on a chip devices. The dimensional values obtained with OCT were compared among themselves (between channels of the same device) and with the values obtained using confocal reflection and confocal fluorescence microscopies. We demonstrated that OCT can be used to image internal structures of polymeric materials, specifically PMMA, and that the measured dimensions are comparable with other well-known methods such as confocal reflectance and confocal fluorescence microscopy. With an axial resolution of

Citation

Journal of Microscopy

Volume

259

Issue

1

Pub Type

Journals

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Keywords

dimensional metrology, OCT, lab on a chip, confocal reflectance microscopy, standard testing

Citation

Reyes-Hernandez, D. , Halter, M. and Hwang, J. (2015), Dimensional Metrology of Lab on a Chip Internal Structures: a Comparison of Optical Coherence Tomography with Coherence Fluorescence Microscopy, Journal of Microscopy, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912533 (Accessed January 2, 2025)