Energy Dispersive X-ray spectromety by Microcalorimetry for the SEM

Published

January 1, 2002

Author(s)

Dale E. Newbury, David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, John A. Small, John M. Martinis

Abstract

Analytical x-ray spectrometry for electron beam instruments has been significantly advanced with the development of the NIST microcalorimeter energy dispersive x-ray spectrometer (mcal EDS). The mcal EDS operates by measuring the temperature rise when a single photon is absorbed in a metal target. A cryoelectronic circuit with electrothermal feedback and a superconducting transition edge sensor serves as the thermometer. Spectral resolution approaching 4.5 eV for high energy photons (6000eV) and 2 eV for low energy photons below 2000 eV has been demonstrated in energy dispersive operation across a photon energy range from 250 eV to 8 keV. Spectra of a variety of materials demonstrate the power of the mcal EDS to solve practical problems while operating on a scanning electron microscope platform.

Volume

138

Conference Dates

May 7-11, 2001

Conference Title

Book of Abstracts, European Microbeam Analysis Society Conference

Pub Type

Conferences

Keywords

electron probe x-ray microanalysis, energy dispersive spectrometry, microcalorimetry, scanning electron microscopy, x-ray spectrometry

Citation

Newbury, D. , Wollman, D. , Nam, S. , Hilton, G. , Irwin, K. , Small, J. and Martinis, J. (2002), Energy Dispersive X-ray spectromety by Microcalorimetry for the SEM, Book of Abstracts, European Microbeam Analysis Society Conference (Accessed December 26, 2024)