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Four-Port Microwave Measurement System Speeds On-Wafer Calibration and Test

Published

Author(s)

Dave K. Walker, Dylan F. Williams, Allen Padilla, Uwe Arz, Hartmut Grabinski

Abstract

A multiport measurement system comprising a coaxial switch network and comprehensive freeware package extends the capabilities of a user's two-port automatic network analyzer and probe station to three-and four-port measurements. The coaxial switch matrix is easily constructed using inexpensive off-the-shelf components. The software includes routines for calibration, measurement, and correction, and generates normal and differential scattering and impedance parameters in a variety of standard data formats. Any in-line two-port calibration, including the multiline Thru-Reflect-Line method, may be used to correct the measurement data.
Citation
Microwave Journal

Keywords

four-port, multiport, network analyzer, on-wafer

Citation

Walker, D. , Williams, D. , Padilla, A. , Arz, U. and Grabinski, H. (2001), Four-Port Microwave Measurement System Speeds On-Wafer Calibration and Test, Microwave Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28489 (Accessed October 14, 2025)

Issues

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Created March 1, 2001, Updated February 19, 2017
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