Potzick, J.
, Dixson, R.
, Quintanilha, R.
, Stocker, M.
, Vladar, A.
, Buhr, E.
, Bodermann, B.
, Hassler-Grohne, W.
, Bosse, H.
and Frase, C.
(2008),
International photomask linewidth comparison by NIST and PTB, Proceedings SPIE Photomask 2008 (BACUS), Monterey, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824713
(Accessed March 8, 2025)