Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8

Published

November 1, 2000

Author(s)

Yicheng Wang, Martin Misakian, Amanda N. Goyettes, James K. Olthoff

Abstract

We report ion energy distributions (IEDs), relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency (rf) reference cell for discharges generated in pure C₂F₆, c-C₄F₈, and in mixtures of each gas with Ar. These discharges contain several ions of significant intensity, with the dominant ion seldom than expected from direct ionization of the feed gas. Neither the C₂F₆ nor the c-C₄F₈ fraction in the Ar mixtures significantly influences the reactive ion composition. IEDs vary from single-peaked to bimodal, the latter indicating rf modulation of the ions' energy as they traverse the plasma sheath. Elevated gas pressures and higher fractions of either C₂F₆ or c-C₄F₈ all result in comparatively broader and more bimodal IEDs. IEDs in pure c-C₄F₈ discharges, compared to C₂F₆ discharges, generally exhibit more pronounced broadening and bimodality.

Citation

Journal of Applied Physics

Issue

10

Pub Type

Journals

Download Paper

Local Download

Keywords

c-C₄F₈, C₂F₆, inductively coupled plasma, ion energy

Citation

Wang, Y. , Misakian, M. , Goyettes, A. and Olthoff, J. (2000), Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C₂F₆ and c-C₄F₈, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=773 (Accessed January 2, 2025)