U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Mechanically Compliant Grating Reflectors for Optomechanics

Published

Author(s)

Utku Kemiktarak, Michael Metcalfe, Mathieu Durand, John R. Lawall

Abstract

We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 x 10^5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F=1200, and used the optical response to probe the mechanical properties of the membrane.
Citation
Applied Physics Letters
Volume
100
Pub Type
Journals

Download Paper

DOI Link

Keywords

subwavelength grating, optomechanics, Fabry-Perot
Atomic / molecular / quantum

Citation

Kemiktarak, U. , Metcalfe, M. , Durand, M. and Lawall, J. (2012), Mechanically Compliant Grating Reflectors for Optomechanics, Applied Physics Letters, [online], https://doi.org/10.1063/1.3684248 (Accessed April 20, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 10, 2012, Updated March 21, 2025