U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Metastable Atom Lithography: A New Technique for Creating Nanostructures

Published

Author(s)

John D. Gillaspy, K K. Berggren, A Bard, J L. Wilbur, Jabez J. McClelland, S L. Rolston, William D. Phillips, M Prentiss, G M. Whitesides
Citation
IEEE Lasers Electro-Opt Soc Newsletter
Volume
10
Pub Type
Others
Physics

Citation

Gillaspy, J. , Berggren, K. , Bard, A. , Wilbur, J. , McClelland, J. , Rolston, S. , Phillips, W. , Prentiss, M. and Whitesides, G. (1996), Metastable Atom Lithography: A New Technique for Creating Nanostructures, IEEE Lasers Electro-Opt Soc Newsletter (Accessed March 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1996, Updated February 19, 2017