Gorman, J.
, Dagalakis, N.
and Boone, B.
(2003),
Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering, Proceedings of SPIE Vol. 5160, San Diego, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822582
(Accessed January 15, 2025)
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Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering
Published
Author(s)
, , B G. Boone
Proceedings Title
Proceedings of SPIE Vol. 5160
Conference Dates
August 4-6, 2003
Conference Location
San Diego, CA, USA
Conference Title
SPIE Vol. 5160
Pub Type
Conferences
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Keywords
beam jitter, beam steering, Control, Micro/Nano Systems, multi-loop control, nanopositioner, optical communication
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 7, 2003, Updated October 12, 2021