Orji, N.
and Barnes, B.
(2018),
Nanometre scale dimensional measurements, Nature Research Device and Materials Engineering Community, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927066, https://devicematerialscommunity.nature.com/
(Accessed June 30, 2024)
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Nanometre scale dimensional measurements
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Nature Research Device and Materials Engineering Community
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Nanometrology, Nanoelectronics
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Created November 13, 2018, Updated January 27, 2020