Allen, R.
, Cresswell, M.
and Buck, L.
(1992),
A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps, IEEE Electron Device Letters
(Accessed November 23, 2024)
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A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps
Published
Author(s)
, ,
Citation
IEEE Electron Device Letters
Volume
13
Issue
6
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created May 31, 1992, Updated October 12, 2021