Walker, D.
, Williams, D.
and Morgan, N.
(1992),
Planar Resistors for Probe Station Calibration, Tech Dig., Auto. RF Tech. Group Conf., Orlando, FL, [online], https://doi.org/10.1109/ARFTG.1992.326993
(Accessed October 31, 2024)
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Planar Resistors for Probe Station Calibration
Published
Author(s)
, , Nicole Morgan
Abstract
This paper investigates the effects of variations in sheet resistance, geometry, distance from the probe tip, and fabrication processes on the impedance of planar nickel-chromium resistors. Resistor reactance is a strong function of film resistance, but depends only weakly on geometry and distance from the probe tip. Photoresist contamination in the resistive film induces more complicated impedance behavior, even at low frequencies. The impact on circuit design and time- and frequency-domain calibrations is considered in light of these results.Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Volume
22
Conference Dates
December 3-4, 1992
Conference Location
Orlando, FL
Pub Type
Conferences
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Citation
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Created December 1, 1992, Updated November 10, 2018