February 19, 2017
Author(s)
Martin L. Green, Kao-Shuo Chang, Ichiro Takeuchi, T Chikyow
Combinatorial methodology is a rapid technique for surveying new gate dielectrics and gate metal electrodes for the very complex advanced CMOS gate stack. Here, we report on a typical metal gate electrode alloy system, the Ni-Ti-Pt ternary. We have