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Search Publications by: Therese A. Butler (Assoc)

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Displaying 26 - 35 of 35

Composition Verification of AlGaAs Epitaxial Layers using Inductively Coupled Plasma Optical-Emission Spectroscopy

September 28, 2003
Author(s)
Kristine A. Bertness, Todd E. Harvey, Albert J. Paul, Larry Robins, Gregory C. Turk, Therese A. Butler, Marc L. Salit
We have applied an analytical chemistry method, inductively coupled plasma optical-emission spectroscopy (ICP-OES), to increase the accuracy of composition measurement of AlGaAs epitaxial thin films. ICP-OES results were compared with composition