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Search Publications by: Keith A Gillis (Fed)

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Displaying 1 - 25 of 91

SLowFlowS: A novel flow standard for semiconductor process gases

March 1, 2025
Author(s)
Jodie Gail Pope, Keith A. Gillis, Aaron Johnson, Joey Boyd, John Wright
Numerous process gases are used in the production of semiconductor chips. Accurate metering of these gases into process chambers is critical for maximizing device throughput and yield. A national flow standard for semiconductor process gases does not exist

Dynamic Measurement of Gas Flow using Acoustic Resonance Tracking

March 21, 2023
Author(s)
Jodie Gail Pope, Keith A. Gillis, James W. Schmidt
We measured gas flows exiting large, un-thermostated, gas-filled, pressure vessels by tracking the time-dependent pressure P(t) and resonance frequency fN(t) of an acoustic mode N of the gas remaining in each vessel. This is a proof-of-principle

LIQUID FLOW METER CALIBRATIONS WITH NIST's 15 kg/s WATER FLOW STANDARD

June 15, 2021
Author(s)
Jodie Gail Pope, Aaron Johnson, James Filla, Vern E. Bean, Michael R. Moldover, Joey Boyd, Christopher J. Crowley, Iosif Isaakovich Shinder, Keith A. Gillis, John D. Wright
We describe the 15 kg/s water flow calibration standard operated by the Fluid Metrology Group of the National Institute of Standards and Technology (NIST) to calibrate liquid flow meters for customers. The 15 kg/s standard is a dynamic, gravimetric, liquid

Modeling Temperature Effects on a Coriolis Mass Flowmeter

September 2, 2020
Author(s)
Fabio O. Costa, Jodie Gail Pope, Keith A. Gillis
Coriolis mass flowmeters are known to be stable, have low uncertainty (± 0.1 %), and are insensitive to fluid properties. This meter type is used for many applications, including as transfer standards for proficiency testing and liquified natural gas (LNG)

Progress Towards a Gas-Flow Standard using Microwave and Acoustic Resonances

July 15, 2019
Author(s)
Jodie Gail Pope, Keith A. Gillis, Michael R. Moldover, Eric Harman, James Mehl
We describe our progress in the development of a novel gas flow standard using the acoustic and microwave resonances of a 1.85 m3, nearly-spherical, steel vessel at pressures up to 7 MPa. For flow calibrations using pressure and acoustic frequency

Calibration of Dynamic Pressure in a Tubing System and Optimized Design of Tube Configuration: A Numerical and Experimental Study

June 12, 2018
Author(s)
Matthew Kovaerk, Luke Amatucci, Keith A. Gillis, Florian Potra, James Ratino, Marc L. Levitan, DongHun Yeo
Accurate prediction of aerodynamic pressures on a building is a key factor in the estimation of wind loads on the building. Since the analytical approach has limited capacity in providing pressure estimates, wind tunnel testing is widely used. The

Characterizing Gas-Collection Volumes with Acoustic and Microwave Resonances

March 27, 2018
Author(s)
Jodie Gail Pope, Keith A. Gillis, Michael R. Moldover, J B. Mehl, Eric Harman
We characterized a 1.8 m3, nearly-spherical, steel shell at pressures up to 7 MPa for use as a gas flow standard. For pressure, volume, temperature, and time measurements, the shell's cavity will collect gas; for blow-down measurements, the shell will be a

NIST Programs to Advance Accurate, Internationally-Recognized Stack Emissions Measurements

September 15, 2016
Author(s)
Aaron Johnson, Iosif Isaakovich Shinder, Rodney A. Bryant, JohnPaul R. Abbott, Keith A. Gillis, Joey Boyd, James Filla, Michael R. Moldover
Accurate flow measurements are essential to quantify the amount of greenhouse gases (GHGs) and other pollutants emitted from power plant stacks. Although protocols have been developed, the uncertainty of stack flow measurements has not been documented. 

Detecting leaks in gas-filled pressure vessels using acoustic resonances

May 6, 2016
Author(s)
Keith A. Gillis, Michael R. Moldover, James B. Mehl
We demonstrate that a leak from a large, unthermostatted pressure vessel into ambient air can be detected an order of magnitude more effectively by measuring the time dependence of the ratio p/f 2 than by measuring the ratio p/T. Here f is the resonance

Measurement Challenges and Metrology for Monitoring CO2 Emissions from Smokestacks – Workshop Summary

January 20, 2016
Author(s)
Aaron N. Johnson, Rodney A. Bryant, Tamae M. Wong, James R. Whetstone, Eric Harman, Woong Kang, Keith A. Gillis, Hsin-Hung Lee, Iosif I. Shinder, Liang Zhang
On April 20-21, 2015, NIST hosted a workshop that, through measurement science, enabled the owners of stationary sources (primarily the electric power industry) and their regulatory agencies (federal and state) to better characterize greenhouse gas (GHG)