U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by: Thomas B. Lucatorto (Assoc)

Search Title, Abstract, Conference, Citation, Keyword or Author
Displaying 1 - 25 of 228

Measurements and model of UV-induced oxidation of aluminum

March 22, 2023
Author(s)
Robert F. Berg, Charles S. Tarrio, Thomas B. Lucatorto
We present measurements and a model of aluminum oxidation induced by ultraviolet (UV) radiation. Spots of oxide were grown by focusing synchrotron radiation onto a polycrystalline aluminum membrane in the presence of water vapor at pressures from 3×10-8

The hazard of UV-induced oxidation to solar-viewing spacecraft optics

March 2, 2023
Author(s)
Charles S. Tarrio, Robert F. Berg, Thomas B. Lucatorto, Dale E. Newbury, Nicholas Ritchie, Andrew Jones, Frank Eparvier
The two most prevalent outgas contaminants on satellites are organic molecules and water vapor. Adsorbed organic molecules can degrade a solar-viewing instrument when they are cracked by ultraviolet radiation (UV) and become a light-absorbing layer of

Evidence Against Carbonization of the Thin-Film Filters of the Extreme Ultraviolet Variability Experiment onboard the Solar Dynamics Observatory

April 1, 2021
Author(s)
Charles Tarrio, Robert F. Berg, Thomas B. Lucatorto, Andrew Jones, Frank Eparvier, Brian Templeman, Donald Woodraska, Marie Dominique
In spite of strict limits on outgassing from organic materials, some spacecraft instruments making long-term measurements of solar extreme ultraviolet (EUV) radiation still suff er signi cant degradation. While such measures have reduced the rate of

Thermally stable thin-film filters for high-power extreme-ultraviolet applications

November 12, 2015
Author(s)
Charles S. Tarrio, Robert F. Berg, Thomas B. Lucatorto, Bruce Lairson, Heidi Lopez, Travis Ayers
We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm-2, Ni-mesh-backed Zr filters have a typical lifetime of 20 hours, at which

Improved measurement capabilities at the NIST EUV Reflectometry Facility

August 1, 2014
Author(s)
Charles S. Tarrio, Steven E. Grantham, Thomas A. Germer, Jack C. Rife, Thomas B. Lucatorto, Mike Kriese, Yuriy Platonov, Licai Jiang, Jim Rodriguez
The NIST Extreme Ultraviolet (EUV) Reflectometry Facility was designed in the 1990s to accommodate the largest multilayer optics envisioned at that time. However, with increasing power requirements for an EUV scanner, source collection optics have grown

EUV-Driven Carbonaceous Film Deposition and Its Photo-oxidation on a TiO2 Film Surface

September 23, 2013
Author(s)
Nadir S. Faradzhev, Monica McEntee, John Yate, Shannon B. Hill, Thomas B. Lucatorto
We report the photo-deposition of a carbonaceous layer grown on a TiO2 thin film by EUV radiation-induced chemistry of adsorbed n-tetradecane and the subsequent photo-oxidation of this film. It is found by chemical analysis of the C layer that irradiation

A synchrotron beamline for extreme-ultraviolet photoresist testing

September 30, 2011
Author(s)
Charles S. Tarrio, Steven E. Grantham, Shannon B. Hill, Nadir S. Faradzhev, Lee J. Richter, Chester Knurek, Thomas B. Lucatorto
Before being used in an extreme-ultraviolet (EUV) scanner, photoresists must first be evaluated for sensitivity and tested to ensure that they will not contaminate the scanner optics. The new NIST facility described here provides data on the contamination

SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research

September 1, 2011
Author(s)
Uwe Arp, Charles W. Clark, Lu Deng, Nadir S. Faradzhev, Alex P. Farrell, Mitchell L. Furst, Steven E. Grantham, Edward W. Hagley, Shannon B. Hill, Thomas B. Lucatorto, Ping-Shine Shaw, Charles S. Tarrio, Robert E. Vest
The calculability of synchrotron radiation (SR) makes electron storage rings wonderful light sources for radiometry. The broadband nature of SR allows coverage of the whole spectral region from the x-ray to the far-infrared. Compact low-energy storage

Optics contamination studies in support of high-throughput EUV lithography tools

March 25, 2011
Author(s)
Shannon B. Hill, Fardina Asikin, Lee J. Richter, Steven E. Grantham, Charles S. Tarrio, Thomas B. Lucatorto, Sergiy Yulin, Mark Schurmann, Viatcheslav Nesterenko, Torsten Feigl
We report on optics contamination rates induced by exposure to broad-bandwidth, high-intensity EUV radiation peaked near 8 nm in a new beamline at the NIST synchrotron. The peak intensity of 50 mW/mm2 allows extension of previous investigations of