January 1, 1994
Author(s)
Jabez J. McClelland, R E. Scholten, R Gupta, Robert Celotta
We demonstrate the use of a standing-wave laser beam to focus chromium atoms as they deposit onto a silicon surface. A permanent array of Cr lines has been fabricated with line width 65 nm, spacing 213 nm, and height 34 nm. The array covers an area of 0.4