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Peter H. Huang, Dean C. Ripple, Michael R. Moldover, Gregory E. Scace
We developed a stable reference hygrometer suitable for operation at temperatures above ambient that has a robust design, inherent stability, and a well-understood theory of measurement. This hygrometer uses a reentrant, radio-frequency, cavity resonator
A desire to increase automation or to eliminate the use of mercury has prompted several ASTM committees to consider alternatives to ASTM Liquid-in-Glass (LiG) thermometers. In this paper, we address the technical issues of choosing an alternative. We first
By means of concrete examples, we discuss the determination of an uncertainty budget for calibration of thermocouples by comparison techniques. In the first example, the calibration of a type T thermocouple (copper versus copper-nickel alloy) in a stirred
Gold versus platinum thermocouples have uncertainties superior to all other thermocouples over the range 0 C to 1000 C. In this paper, we describe the properties of 21 specially-constructed gold versus platinum (Au/Pt) thermocouple thermometers, each
William A. Kimes, Kenneth G. Kreider, Dean C. Ripple, Benjamin K. Tsai
Many Rapid Thermal Processing (RTP) tools are currently monitored and controlled with lightpipe radiometers (LPRTs), which have been limited to measuring temperatures above 500 C because of the low signal level below 500 C. New commercial LPRTs couple the
Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai
Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of heating and cooling may have an important influence on resist lithographic response. Generally
Kenneth G. Kreider, William A. Kimes, Christopher W. Meyer, Dean C. Ripple, Benjamin K. Tsai, D H. Chen, D P. DeWitt
Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables more
Recently, Kose et al. proposed general principles that should guide any future discussions regarding the redefinition of the SI base units and they illustrated their principles with an example of a revised SI. Part of their example (redefinition of the
Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell mounted in
Gregory F. Strouse, Dana R. Defibaugh, Michael R. Moldover, Dean C. Ripple
The NIST Acoustic Thermometer determines the thermodynamic temperature by measuring the speed of sound of argon in a spherical cavity. We obtained the thermodynamic temperature of three fixed points on the Interna-tionalTemperature Scale of 1990: the
Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse
The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale throughout the range 273 K to 800 K with uncertainties of only afew millikelvins. The acoustic
Traceable Temperatures outlines the most common methods of measuring temperature and teaches the reader practical skills in assuring that those measurements are made with confidence at a known level of uncertainty. For a beginning user of thermometers or
Standard Reference Material (SRM) 1749 is a lot of 18 specially-constructed gold versus platinum (Au/Pt) thermocouple thermometers, each calibrated on the International Temperature Scale of 1990 (ITS-90) and supplied with integral lead wires and a
A variety of alternate calibration schemes which approximate the ITS-90 are possible when using high-purity noble metals. The high purity of the sensor materials allows the use of correlations that exist between the measured properties at fixed point
In order to identify limitations on the use of Pt/Pd thermocouples as high-accuracy thermometers, we have studied the change in thermocouple emf at the Al and Ag freezing points following a series of heat treatments at various temperatures for several lots
In this overview of thermocouple thermometry, temperature scales, traceability, and the basic principles of thermocouple theory and construction are first discussed. Topics relevant to semiconductor processing and limitations to thermocouple performance
Billy W. Mangum, G T. Furukawa, Kenneth G. Kreider, Christopher W. Meyer, Dean C. Ripple, Gregory F. Strouse, Weston L. Tew, Robert D. Saunders, Bettye C. Johnson, Howard W. Yoon, Michael R. Moldover, Charles E. Gibson
The International Temperature Scale of 1990 (ITS90) is defined from 0.65 K upwards to the highest temperature measurable by spectral radiation thermometry, the radiation thermometry being based on the Planck radiation law. Part I of this paper describes
This database fully reproduces the tables of NIST Monograph 175, Temperature-Electromotive ForceReference Functions and Tables for the Letter-Designated Thermocouple Types Based on the ITS-90, by Burns, Scroger, Strouse, Croarkin, and Guthrie.These
Thin-film thermocouples (TFTCs) can be fabricated from a much broader range of electrical conductors than wire thermocouples, but even with the same composition as the wire thermocouple, the TFTCs may have different thermoelectric coefficients. Also, the
An equation determining the steady-state profile of a liquid meniscus advancing or receding across a heated plate is derived. The effects of liquid evaporation, intermolecular interaction with the plate, and thermocapillarity are included. Numerical and
Dean C. Ripple, Dana R. Defibaugh, Keith A. Gillis, Michael R. Moldover
Primary acoustic thermometers determine the thermodynamic temperature of a monatomic gas from measurements of the speed of sound in the gas. Here, we describe the design and construction of an acoustic thermometer designed to operate at temperatures up to
We present an emf-temperature reference function for platinum versus palladium (Pt/Pd) thermocouples in air for the range 0 degrees {Celsius} to 1500 degrees {Celsius}. The reference function is based on the International Temperature Scale of 1990 (ITS-90)
Thin-film thermocouples have been found useful in numerous applications ranging from thermal convertors, heat flux gages, and thermopiles to surface temperature sensors for turbine engine blades and diesel engine cylinders. Because of their small size