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Search Publications by: David G. Seiler (Assoc)

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Displaying 26 - 50 of 166

The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

March 21, 2012
Author(s)
Janet M. Cassard, Jon C. Geist, Michael Gaitan, David G. Seiler
The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary

User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition

September 6, 2011
Author(s)
Janet M. Cassard, Jon C. Geist, Theodore V. Vorburger, David T. Read, David G. Seiler
The Microelectromechanical Systems (MEMS) 5-in-1 is a standard reference device sold as a NIST Standard Reference Material (SRM) that contains MEMS test structures on a test chip. The two SRM chips (2494 and 2495) provide for both dimensional and material

Optical Properties of Semiconductors

October 19, 2009
Author(s)
David G. Seiler, Stefan Zollner, Alain C. Diebold, Paul Amirtharaj
Rapid advances in semiconductor manufacturing and associated technologies have increased the need for optical characterization techniques for materials analysis and in-situ monitoring/control applications. Optical measurements have many unique and