March 13, 2003
Author(s)
Stephen Semancik, Richard E. Cavicchi, Douglas C. Meier, C J. Taylor, N O. Savage, M C. Wheeler
This paper describes MEMS microheater structures that have been employed in the development of chemical (gas) microsensors and other microanalytical components, such as preconcentrators and filters/separators. The role of microscale temperature control is