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Search Publications by: Robert E Vest (Fed)

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Displaying 76 - 100 of 140

Response of a Silicon Photodiode to Pulsed Radiation

September 1, 2003
Author(s)
Robert E. Vest, Steven E. Grantham
Both the integrated-charge and peak-voltage responsivity of a 1 cm2 Si photodiode optimized for the extreme ultraviolet have been measured with 532 nm wavelength pulsed radiation. The peak power of the optical pulse is varied from 35 mW to 24 kW with a

Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography

July 1, 2003
Author(s)
Charles S. Tarrio, S Grantham, M B. Squires, Robert E. Vest, Thomas B. Lucatorto
Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity at 13 nm

Present Status of Radiometric Quality Silicon Photodiodes

February 1, 2003
Author(s)
R Korde, C Prince, N. Cunningham, Robert E. Vest, E Gullikson
Evaluation of five types of silicon photodiodes was undertaken to verify their suitability for absolute radiometry and also for their use as transfer standards in the spectral region from 1 nm to 1100 nm. Four types of photodiodes were fabricated for this

Absolute Extreme Ultraviolet Metrology

August 1, 2001
Author(s)
Charles S. Tarrio, Robert E. Vest, S Grantham
NIST has a long-standing program for the calibration of extreme ultraviolet optical components. Begun with the advent of the Synchrotron Ultraviolet Radiation Facility (SURF) almost 40 years ago, early activities centered on the development and

AlGaN Schottky Diodes for Short-Wavelength UV Applications

June 1, 2001
Author(s)
P P. Chow, J J. Klaassen, Robert E. Vest, J M. VanHove, A Wowchak, C Polley
High performance ultraviolet (UV) detectors have been fabricated using plasma-enhanced molecular beam epitaxy (MBE). The realized AlGaN Schottky detectors exhibit high responsivity, sharp spectral cutoff and high shunt resistance of several giga-ohns for 0