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Search Publications by: Thomas A. Germer (Fed)

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Displaying 151 - 175 of 359

Measuring Interfacial Roughness by Polarized Optical Scattering

October 10, 2005
Author(s)
Thomas A. Germer
Polarized optical scatter measurements yield information that can be used to identify sources of scatter. In this chapter, we review measurements of angle-resolved polarized optical scattering and their application to the measurement of roughness of

High-resolution Optical Metrology

May 1, 2005
Author(s)
Richard M. Silver, Ravikiran Attota, Michael T. Stocker, M R. Bishop, Lowell P. Howard, Thomas A. Germer, Egon Marx, M P. Davidson, Robert D. Larrabee
Recent advances in optical imaging techniques have unveiled new possibilities for optical metrology and optical-based process control measurements of features in the 65 nm node and beyond. In this paper we discuss methods and applications that combine

Out-of-Plane Polarimetric Imaging of Skin: Surface and Subsurface Effects

April 4, 2005
Author(s)
J C. Ramella-Roman, D Duncan, Thomas A. Germer
True borders of certain skin cancers are hard to detect by the human eye. For this reason, techniques such as polarized light imaging have been used to enhance skin cancer contrast before Mohs surgery procedures. In standard polarized light imaging the