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Search Publications by: Daniel Wheeler (Fed)

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Displaying 26 - 50 of 106

Control of Overfill Bumps in Damascene Cu Electrodeposition

October 16, 2008
Author(s)
Soo K. Kim, Daniel Wheeler, Daniel Josell, Thomas P. Moffat
Electroanalytical measurements and feature filling experiments have been conducted to study the effect of dodecyltrimethylammonium chloride (DTAC) and branched polyethyleneimine (PEI) on Cu deposition as levelers in the presence of various combinations of

Modeling Superconformal Electrodeposition Using an Open Source PDE Solver

October 16, 2008
Author(s)
Daniel Wheeler, Jonathan E. Guyer
Superconformal electrodeposition enables the void-free filling of high aspect ratio features such as trenches or vias in the Damascene metallization process. Superconformal electrodeposition, also known as superfill, occurs when particular combinations of

Superfilling When Adsorbed Accelerators Are Mobile

February 6, 2007
Author(s)
Daniel Josell, Thomas P. Moffat, Daniel Wheeler
Bottom-up superfill during electrodeposition that is used for industrial processing of damascene copper interconnects has also been demonstrated during electrodeposition of silver and gold. The Curvature Enhanced Accelerator Coverage (CEAC) mechanism has

Curvature Enhanced Adsorbate Coverage Model for Electrodeposition

January 11, 2006
Author(s)
Thomas P. Moffat, Daniel Wheeler, Soo K. Kim, Daniel Josell
The impact of leveling additives acting through the traditional leveling mechanism of accumulation and consumption has been coupled with the Curvature Enhanced Accelerator Coverage (CEAC) mechanism previously used to explain bottom-up superfill of features

Gold Superfill in Sub-Micrometer Trenches: Experiment and Prediction

November 16, 2005
Author(s)
Daniel Josell, Daniel Wheeler, Thomas P. Moffat
Bottom-up deposition of gold in fine trenches, also called superfill, was recently demonstrated using a submonolayer coverage of preadsorbed, deposition-rate-accelerating lead followed by gold electrodeposition. The present study has used experiments on

FiPy: A Finite Volume PDE Solver Using Python

September 1, 2005
Author(s)
Daniel Wheeler, Jonathan E. Guyer, James A. Warren
The solution of coupled sets of partial differential equations (PDEs) is ubiquitous in continuum models for phase transformations, such as in phase field or level et simulations. We are developing an object-oriented PDE solver, written in the Python

Superconformal Deposition and the CEAC Mechanism

February 27, 2004
Author(s)
Thomas P. Moffat, Daniel Wheeler, Daniel Josell
The mechanism and modeling of superconformal film growth used in the electrochemical fabrication of 3-D Cu interconnects is briefly reviewed. The central role of electrolyte additives in controlling feature filling is fully described by the curvature