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Search Publications by: Bala Muralikrishnan (Fed)

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Displaying 76 - 83 of 83

Roundness Measurements Using the NIST Fiber Probe

January 1, 2007
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have described a fiber probe for dimensional measurement of micro-holes in the 2004 and 2006 ASPE annual meetings. In this abstract, we describe the adaptation of this probe for measuring roundness of tiny holes and knife edge apertures. In its current

Enhanced Capabilities of the NIST Fiber Probe for Microfeature Metrology

January 1, 2006
Author(s)
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have previously reported work in the area of fiber probe development at NIST for micro feature measurement. This probe, which we refer to as the Fiber Deflection Probe, functions by optically imaging the stem from two orthogonal directions a few

Fiber Deflection Probe for Small Hole Metrology

January 1, 2006
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
This paper presents the development of a new probing method for Coordinate Measuring Machines (CMM) to inspect diameter and form of small holes. The technique, referred to as fiber deflection probing, can be used for holes of approximately 100 mm nominal

Fiber Deflection Probe Uncertainty Analysis for Micro Holes

January 1, 2006
Author(s)
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have recently reported on a new probe, the Fiber Deflection Probe (FDP), for diameter and form measurement of large aspect ratio micro-holes (100 um nominal diameter, 5 mm deep). In this paper, we briefly review the measurement principle of the FDP

A Fiber Probe for CMM Measurements of Small Features

August 1, 2005
Author(s)
Jack A. Stone Jr., Balasubramanian Muralikrishnan, John R. Stoup
We report on performance of a new form of fiber probe, which can be used in conjunction with a coordinate measuring machine (CMM) for microfeature measurement. The probe stylus is a glass fiber with a small ball (?75 ?m diameter) glued to the end. When the

Measuring Internal Geometry of Fiber Ferrules

May 1, 2005
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
The focus of this paper is on the metrology of microstructures. Traditional Coordinate Measuring Machines (CMM) are limited to measuring holes of 300 m diameter. Smaller features and holes require thinner styli & novel probing technologies that can

Micro-Feature Metrology

May 1, 2005
Author(s)
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
This presentation focuses on three aspects of micro-feature metrology novel applications that drive research and commercialization, capabilities and limitations of existing sensors and techniques, and finally a summary of recent research including ongoing