August 15, 2012
      
                  
        
  Author(s)
  Yong Sik  Kim,   Nicholas G. Dagalakis,   Satyandra K. Gupta
 
       
            
    
    
        This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 Degree