August 29, 2011
      
                  
        
  Author(s)
  Erich N. Grossman,   Zoya  Popovic
 
       
            
    
    
        This paper gives an overview of measurement techniques used in the THz region of the electromagnetic spectrum, from about 100 GHz to several THz. Currently available components necessary for THz metrology, such as sources, detectors and passives, are