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Search Publications by: Daniel Sunday (Fed)

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Displaying 26 - 50 of 78

X-ray Metrology for the Semiconductor Industry Tutorial

February 1, 2019
Author(s)
Daniel F. Sunday, Wen-Li Wu, Scott Barton, Regis J. Kline
The semiconductor industry is in need of new, in-line dimensional metrology methods with higher spatial resolution for characterizing their next generation nanodevices. The purpose of this short course is to train the semiconductor industry on the NIST

Xi-cam: A versatile interface for data visualization and analysis

April 13, 2018
Author(s)
Ronald Pandolfi, Dinesh Kumar, Guillaume Freychet, Holden Parks, Singanallur venkatakrishnan, Austin Blair, shreya Sahoo, Stefano marchesini, Christopher D. Liman, Daniel Sunday, Lenson Pellouchoud, Christopher Tassone, dilworth parkinson, Sean Fackler, Zhang Jiang, Apurva Mehta, Masafumi Fukuto, Kevin G. Yager, Regis J. Kline, Joseph Strzalka, Thomas Caswell, daniel Allan, Stuart Campbell, James Sethian, Harinarayan Krishnan, Alexander Hexemer

Optimizing Self-Consistent Field Theory Block Copolymer Models with X-Ray Metrology

February 12, 2018
Author(s)
Adam F. Hannon, Daniel Sunday, Alec Bowen, Gurdaman Khaira, Jiaxing Ren, Paul Nealey, Juan de Pablo, Regis J. Kline
A block copolymer self-consistent field theory (SCFT) model is used for direct analysis of experimental X-ray scattering data obtained from thin films of polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) made from directed self-assembly. In a departure

Modeling the polarized X-ray scattering from periodic nanostructures with molecular anisotropy

December 1, 2017
Author(s)
Christopher D. Liman, Thomas A. Germer, Daniel F. Sunday, Dean M. DeLongchamp, Regis J. Kline
We discuss a new technique to measure molecular orientation in nanostructures using resonant soft X-rays. This technique is based on a variable angle transmission measurement called critical dimension X-ray scattering that enables the characterization of