Standard approaches to XPS quantification – A summary of ISO 18118:2024 on the use of relative sensitivity factors

Published

November 18, 2024

Author(s)

David Cant, Justin Gorham, Charles Clifford, Alexander Shard

Abstract

Quantitative analysis of electron spectroscopy data from techniques such as Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS), typically require the use of relative sensitivity factors (RSFs). Virtually all routine XPS experiments attempt to turn peak intensities into compositions using RSFs. The comparability and reproducibility of surface chemical analysis by electron spectroscopies therefore requires the standardisation of RSFs and their use. RSFs may be determined either from theoretical calculations based on photo-ionisation cross-sections1,2, or empirically through direct measurement of homogeneous reference samples of known composition. The accurate use of sensitivity factors, even empirically determined RSFs, requires accounting for the effect of material differences on relative intensities, the so-called 'matrix effects'. ISO 18118:20243 is the most recently revised version of the ISO standard for the use and determination of empirical relative sensitivity factors for quantitative analysis of homogeneous materials by AES and XPS4. This article provides a summary of the new, updated standard and the methods described therein, noting in particular the revisions made since the previous edition, ISO 18118:2015.

Citation

Surface and Interface Analysis

Volume

57

Issue

2

Pub Type

Journals

Download Paper

https://doi.org/10.1002/sia.7371

Local Download

Keywords

XPS, Auger, electron spectroscopy, relative sensitivity factors, RSF, AMRSF, PERSF, empirical relative sensitivity factors, ISO, Standard, Standardization

Citation

Cant, D. , Gorham, J. , Clifford, C. and Shard, A. (2024), Standard approaches to XPS quantification – A summary of ISO 18118:2024 on the use of relative sensitivity factors, Surface and Interface Analysis, [online], https://doi.org/10.1002/sia.7371, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958592 (Accessed March 2, 2025)