Cheron, J.
, Jones, R.
, Bosworth, B.
, Jargon, J.
, Jamroz, B.
and Feldman, A.
(2024),
Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization, The International Society of Infrared, Millimeter, and Terahertz Waves 2024, Perth, AU, [online], https://doi.org/10.1109/IRMMW-THz60956.2024.10697705, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957785
(Accessed January 14, 2025)
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Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization
Published
Author(s)
, , , , ,
Abstract
We report accurate small-signal measurements of heterojunction-bipolar-transistors (HBTs) that are characterized with two on-wafer multiline thru-reflect-line (mTRL) calibration kits. The first calibration kit is designed with thin-film microstrip standards that are optimized for the characterization of multi-finger transistor cells while the second calibration kit integrates inverted grounded coplanar waveguide (G-CPW) transmission line standards to provide accurate characterization of single-finger transistor devices. We characterize the two calibration kits up to 500 GHz and 1100 GHz, respectively, and demonstrate high accuracy in small-signal measurements of single and multi-finger HBTs up to 325 GHz.Proceedings Title
The International Society of Infrared, Millimeter, and Terahertz Waves 2024
Conference Dates
September 1-6, 2024
Conference Location
Perth, AU
Pub Type
Conferences
Keywords
on-wafer calibration, multiline thru-reflect-line (mTRL), terahertz (THz) frequencies, heterojunction-bipolar-transistors (HBTs)
Citation
Issues
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Created October 7, 2024, Updated December 9, 2024