@misc{1161696,
  author = {Loren W Linholm},
  title = {The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control:},
  year = {1981},
  month = {1981-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-66},
  language = {en},
}