@conference{824351,
  author = {K Kreider and D Chen and W Kimes and D DeWitt and Benjamin Tsai},
  title = {Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA},
  language = {en},
}