TY  - GEN
AU  - Kane, Didier
AU  - Moore, Benjamin A
AU  - Walters, W Janes
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1987-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.87-3588
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1987
TI  - RADCNBS international workshop moisture measurement and control for microelectronics (IV) ::proceedings of the RADCNBS workshop held at the National Bureau of Standards Gaithersburg, MD November 12-14, 1986
ER  -